物理学报2012，Vol.61Issue(8)：452-460,9.
Ti/Ti-类金刚石多层膜的制备与表征
Preparation and characterization of multilayered titanium/titanium-diamond-like carbon films
摘要
Abstract
The titanium/titanium diamond-like carbon （Ti/Ti-DLC） multi-layered films are deposited by combined electron cyclotron resonance microwave plasma enhanced chemical vapor deposition method and mid-frequency magnetron sputtering method using acetylene as the reactive gas and Ti target with a purity of 99.99%. The structures, compositions and surface morphologies of the samples are characterized by X-ray diffraction, scanning electron microscope, and X-ray photoelectron spectrometer. The mechanical properties of Ti/Ti-DLC multilayer films are investigated by microhardness tester, friction wear test instrument and surface roughmeter. The results show that TiC phase appears in multilayered film. The main growth mode of the film is island mode and there exists columnar crystal structure neither in Ti layer nor Ti-DLC layer. The properties of the multi-layered film, including composite hardness, friction coefficient, surface morphology and surface roughness are affected by the modulation period A. It is shown that nano-hardening effect takes place when A is small while large particles appear on the surface of the film, leading to a large surface roughness and friction coefficient. The layered structure of the film is not clear when A ≤ 50 nm.关键词
Ti／Ti-类金刚石多层膜/电子回旋共振一化学气相沉积/调制周期Key words
Ti/Ti-diamond-like carbon multilayered films/electron cyclotron resonance-chemical vapor deposi-tion/modulation cycle分类
数理科学引用本文复制引用
黄江涛,毛斐,虞烈,汤皎宁..Ti/Ti-类金刚石多层膜的制备与表征[J].物理学报,2012,61(8):452-460,9.基金项目
国家高技术研究发展计划（批准号：2007AA050501）、广东省科技计划（批准号：20098010900035）和深圳市科技计划（批准号：JC200903130309A）资助的课题. （）
