中国光学2012，Vol.5Issue(2)：194-198,5.
基于Norland紫外固化胶的热光开关器件
Thermo-optic switch device based on Norland optical adhesive
摘要
Abstract
Norland Optical Adhesive（NOA）,a new type of polymer material,is used to fabricate the Mach-Zehnder thermo-optic switch in this paper.The optical properties of NOA film materials are characterized.The waveguides with good profiles are fabricated by the Inductively Coupled Plasma（ICP） method.The insertion loss of a 2.2 cm-length straight waveguide is 8.3 dB at 1 550 nm.The extinction ratio of the thermo-optic switch is 11 dB and the driving power is 83 mW when the DC bias is loaded on the electrodes.The switching property of the device is tested with DC bias,and the rise time and the fall time of the switch are 1.085 ms and 489.5 μs,respectively.Experimental results show that the NOA material has great potentials in fabricating thermo-optic switches and other polymer waveguide integrated devices.关键词
平面光波导/聚合物光波导/热光开关/Norland紫外固化胶Key words
planar optical waveguide/polymer optical waveguide/thermo-optic switch/Norland Optical Adhesive(NOA)分类
信息技术与安全科学引用本文复制引用
王旗,王希斌,孙小强,田亮,王菲,张大明..基于Norland紫外固化胶的热光开关器件[J].中国光学,2012,5(2):194-198,5.基金项目
国家自然科学基金资助项目 （）
吉林省青年科研基金资助项目 （）
吉林大学基本科研业务费专项资金资助项目 （）
