中国机械工程2012，Vol.23Issue(8)：888-892,896,6.
平面光波导精密对准平台运动误差的敏感性分析
Motion Error Sensitivity Analysis of Planar Optical Waveguide Precise Aligning Stage
摘要
Abstract
In aligning process of a fiber array and waveguide chip,the motion accuracy of multi-DOF precise motion stage impacts the coupling efficiency directly.Adopting multi-body dynamics theory,each error source of the motion stage was analyzed,the error model of multi DOF precise motion stage was built,and the Sobol method which was based on variance was used to develop sensitivity analysis,and the impaction degree of each error parameters at each direction was derived.The experimental results reflect that the modeling method and sensitivity analysis method are available,which means the method is applicability.The sensitivity analysis can provide data for motion precision control,error compensation analysis and system optimization.关键词
光波导对准/精密运动平台/多体动力学/敏感性分析Key words
optical waveguide alignment/precise motion stage/multi-body dynamics/sensitivity analysis分类
信息技术与安全科学引用本文复制引用
唐皓,段吉安,郑煜,祝孟鹏..平面光波导精密对准平台运动误差的敏感性分析[J].中国机械工程,2012,23(8):888-892,896,6.基金项目
国家自然科学基金资助项目 （）
国家高技术研究发展计划（863计划）资助项目 （）
