真空电子技术Issue(1)：36-42,7.
多孔硅场发射阴极研究进展
Developments of Porous Silicon Cold Cathode
摘要
Abstract
Porous silicon (PS) cold cathode has several advantageous features, such as high energy e-lectrons emission, narrow emission angle, insensitivity to vacuum pressure, and quick dynamic response. This type of cathode is a good choice for field emission display. Moreover, it brings the hope for the fabrication of mercury-free, efficient, and stable flat panel light sources based on discharge-free light emission. This paper introduces the structure and developments of PS cathode and its potential applications in display devices, gas excitation without discharge, thin metal film deposition, electron beam lithography and so on.关键词
多孔硅/冷阴极/表面电子发射/平板显示器件Key words
Porous silicon, Cold cathode, Surface electron emitting, Flat panel display分类
信息技术与安全科学引用本文复制引用
罗文,胡文波..多孔硅场发射阴极研究进展[J].真空电子技术,2012,(1):36-42,7.基金项目
中央高校基本科研业务费专项资金资助项目(No.2010-61) （No.2010-61）
