半导体学报(英文版)2012,Vol.33Issue(5):21-25,5.DOI:10.1088/1674-4926/33/5/053003
Effect of magnesium doping on the light-induced hydrophilicity of ZnO thin films
Effect of magnesium doping on the light-induced hydrophilicity of ZnO thin films
摘要
Abstract
Undoped and Mg-doped ZnO thin films were deposited on Si (111) and quartz substrates by using the sol-gel method.Microstructure,surface topography and water contact angle of the thin films have been measured by X-ray diffraction (XRD),an atomic force microscope (AFM) and water contact angle apparatus,respectively.The XRD results show that all the thin films are polycrystalline with a hexagonal structure and have a preferred orientation along the c-axis perpendicular to the substrate.With the increase of Mg concentration,the RMS roughness increases from 2.14 to 9.56 nm and the contact angle of the un-irradiated thin films decreases from 89° to 82°.The wetting behavior of the resulting films can be reversibly switched from hydrophobic to hydrophilic,through alternation of UV illumination and dark storage.The light-induced efficiency of the thin films increases with the increase of Mg concentration.关键词
ZnO/ sol-gel/ Surface topography/ hydrophilicityKey words
ZnO/ sol-gel/ Surface topography/ hydrophilicity引用本文复制引用
Huang Kai,Lü Jianguo,Zhang Li,Tang Zhen,Yu Jiangying,Li Ping,Liu Feng..Effect of magnesium doping on the light-induced hydrophilicity of ZnO thin films[J].半导体学报(英文版),2012,33(5):21-25,5.基金项目
Project supported by the National Natural Science Foundation of China (Nos.51102072,11104001) and the Natural Science Foundation of Anhui Higher Education Institution of China (Nos.K J2010A284,K J2010B172,K J2010B024). (Nos.51102072,11104001)