光学精密工程2012，Vol.20Issue(6)：1265-1271,7.DOI:10.3788/OPE.20122006.1265
压电陶瓷微动台的复合控制
Feed-forward control of piezoelectric ceramic positioning stage
摘要
Abstract
As the nonlinear hysteresis of a piezoelectric ceramic positioning stage affects its dynamic positioning precision badly, this paper proposes a model for the piezoelectric ceramic hysteresis based on a modified PI hysteresis model. In order to improve the dynamic positioning precision of the piezoelectric ceramic positioning stage based on traditional PID algorithm, the feed-forward control is constituted with the modified PI inverse hysteresis model and a traditional PID, and the experiments on slow speed and high speed positionings are performed. Experimental results show that the maximal error and mean error of the feed-forward controller are 40% and 20% ?30% that of traditional PID algorithm for tracking single frequency trajectory. For multi-frequency trajectory tracking, the feed-forward controller has better dynamic control effect, and both maximal error and mean error are almost 33% that of traditional one. These data indicate the availability of the feed-forward control algorithm.关键词
压电陶瓷/迟滞特性/改进的PI迟滞模型/前馈控制/动态定位精度Key words
piezoelectric ceramic /hysteresis characteristic /modified PI hysteresis model/ feed-forward controll/dynamic positioning precision分类
信息技术与安全科学引用本文复制引用
王俐,饶长辉,饶学军..压电陶瓷微动台的复合控制[J].光学精密工程,2012,20(6):1265-1271,7.基金项目
国家自然科学基金重点项目(No.11178004) （No.11178004）
