MEMS用含能薄膜研究现状及进展OA北大核心CSCDCSTPCD
Review on Energetic Thin Films for MEMS
在综合分析国内外含能薄膜相关文献的基础上,认为金属复合含能薄膜桥、含能半导体桥及纳米多孔硅/氧化剂复合薄膜制作工艺与微机电系统( micro-electro-mechanical systems,MEMS)器件制备技术具有良好的兼容性,在此基础上阐述了上述三种薄膜材料的制备方法及输出特性,认为MEMS火工装置为火工技术的发展提供了一个重要的研究方向.
Based on the comprehensive analysis of literatures about energetic thin films, it is concluded that the technology and process of preparation for metal-composite energetic film, energetic semiconductor bridge(SCB) and nano-porous silicon/oxidant composite films are compatible with one of preparation on the micro-electro-mechanicat systems( MEMS) devices. In addition, through representation about the methods of fabrication and energy output characterist…查看全部>>
王述剑;彭泓铮;张文超;马立远
空军驻西南地区军事代表室,重庆 400021南京理工大学化工学院,江苏 南京 210094南京理工大学化工学院,江苏 南京 210094南京理工大学化工学院,江苏 南京 210094
军事科技
材料科学含能材料微机电系统( micro-electro-mechanical systems,MEMS)火工品
materials science energetic materials micro-electro-mechanical system(MEMS) initiating explosive device
《含能材料》 2012 (2)
含能半导体桥的原位制备及发火机理研究
234-239,6
国家自然科学基金资助项目(50806033)
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