理化检验：物理分册2012，Vol.48Issue(6)：365-369,418,6.
扫描电镜中颗粒能谱定量分析的质量效应
Mass Effect of Particle Energy Dispersive Spectrometer Quantitative Analysis in Scanning Electron Microscope
杜婷 1周振新 1李丽敏 1张正极1
作者信息
- 1. 北京北冶功能材料有限公司,北京100192
- 折叠
摘要
Abstract
Morphology and compositions of the second particles in precision alloy were analyzed by scanning electron microscopy（SEM） with energy dispersive spectrometer（EDS）,and mass effect of particle EDS quantitative analysis was studied.The results show that the mass effect is obvious during particle EDS quantitative analysis.The different of compositions between the particles and matrix is bigger,the mass effect is more obvious,and influences of accelerating voltage on mass effect are also observed.It was found there is a critical size during particle EDS quantitative analysis,and the mass effect disappears when the particle size is bigger than the critical size.The two dimension size of the particle of the polished surface is different from the actual three dimension size,so the critical size characterized by the mass effect is different from the theoretical critical size.But the variety tendency and the statistics laws that researched by the mass effect of particle EDS quantitative analysis are very obvious.关键词
扫描电镜/能谱仪/颗粒分析/质量效应/临界尺寸Key words
scanning electron microscopy/energy dispersive spectrometry/particle analysis/mass effect/critical size引用本文复制引用
杜婷,周振新,李丽敏,张正极..扫描电镜中颗粒能谱定量分析的质量效应[J].理化检验：物理分册,2012,48(6):365-369,418,6.
