强激光与粒子束2012，Vol.24Issue(5)：1169-1172,4.DOI:10.3788/HPLPB20122405.1169
铒、钪膜中离子注入氦的热解析行为
Thermal desorption behavior of ion-implanted helium from erbium and scandium films
摘要
Abstract
The thermal desorption behavior of ion-implanted helium in erbium and scandium films was investigated by means of thermal helium desorption spectrometry. The peak positions of ion-implanted helium desorption are the same for erbium films with different surface morphologies. The degree of denseness of films, however, will affect the amount of released helium as the implanted helium releases through the path of cavities existing in the loose film before thermal desorption. The difference in peak positions of helium desorption from erbium and scandium films may be related to the depth distribution of helium and the degree of denseness of films. The helium implantation depths measured by enhanced proton backscattering spectrometry are 210 and 308 nm, respectively, for erbium and scandium films with the implantation energy of 60 keV.关键词
铒膜/钪膜/氦离子注入/热解析/氦泡Key words
erbium film/scandium film/helium ion implantation/thermal desorption/helium bubble分类
能源科技引用本文复制引用
周晓松,申华海,彭述明,龙兴贵,杨莉,祖小涛..铒、钪膜中离子注入氦的热解析行为[J].强激光与粒子束,2012,24(5):1169-1172,4.基金项目
国家自然科学基金委员会-中国工程物理研究院联合基金项目(10976007) （10976007）
中国工程物理研究院科学技术基金项目(2009A0301015) （2009A0301015）
