物理学报2012，Vol.61Issue(12)：148-154,7.
1000线／毫米软X射线自支撑闪耀透射光栅的设计与制作
Design and fabrication of 1000 line/mm soft X-ray freestanding blazed transmission gratings
摘要
Abstract
The performance prediction of freestanding blazed transmission grating is discussed using scalar diffraction theory, and grating design parameters are accodingly given. A freestanding transmission grating with a period of 1 lxm, duty cycle of 0.1-0.2, aspect ratio of about 100, thickness of 10 μm and fractional area of 65% is successfully fabricated by holographic lithography and anisotropic wet etching. The size of a single die is 15 mmx 15 mm divided into four 5 mmx 5 mm windows. The diffraction efficiency of the fabricated grating is tested at the National Synchrotron Radiation Laboratory in a wavelength region of 5-50 nm. The wavelength scanning results show a strong blazing effect in the direction of specular reflection from mirror-like grating sidewalls, as expected. The measured and normalized diffraction efficiency is consistent with the theoretical prediction within 38%-49% due to grating structural imperfections. These experimental results prove not only the concept of blazed transmission grating but also practicability of the fabrication process.关键词
自支撑透射光栅/闪耀效应/全息光刻/各向异性腐蚀Key words
freestanding transmission grating/blazing effect/holographic lithography/anisotropic wet etching分类
轻工纺织引用本文复制引用
陈勇,邱克强,徐向东,刘正坤,刘颖,付绍军..1000线／毫米软X射线自支撑闪耀透射光栅的设计与制作[J].物理学报,2012,61(12):148-154,7.基金项目
国家高技术研究发展计划（批准号：2009AAl292）和国家自然科学基金（批准号：10875128,11005111）资助的课题. （）
