新型炭材料2012，Vol.27Issue(2)：81-86,6.
化学气相沉积低温热解炭的微观组织结构与沉积模型
Deposition model and microstructure of low temperature pyrocarbon produced by chemical vapor deposition
摘要
Abstract
Low temperature pyrocarbon (PyC) was prepared by chemical vapor deposition. The microstructure of the deposited PyC was investigated by scanning and transmission electron microscopy with selected area electron diffraction. Results show that the PyC is composed of spherical carbon particles less than 2 jxm in diameter. The center of the particles is carbon black, whereas the outer layer is medium-textured PyC. The deposition of the PyC includes four steps: formation of carbon black, growth of the outer layer on the carbon black, deposition of PyC on the surface of carbon particles and aggregation of carbon particles.关键词
热解炭/化学气相沉积/微观结构/沉积模型Key words
Pyrocarbon/Chemical vapor deposition/ Microstructure/ Deposition model分类
化学化工引用本文复制引用
李克智,和永岗,李贺军,魏建锋,张磊磊,李淑萍..化学气相沉积低温热解炭的微观组织结构与沉积模型[J].新型炭材料,2012,27(2):81-86,6.基金项目
国家自然科学基金(90716024),国家“111”引智计划(B08040) （90716024）
