原子能科学技术2012，Vol.46Issue(6)：744-748,5.
合金化对溅射Ti膜材结构和力学性能的影响
Influence of Alloying Elements on Structures and Mechanical Properties of Direct Current Magnetron Sputtering Ti Films
摘要
Abstract
Thin films of Ti and its alloys TiMo, TiMoY and TiMoYAl were deposited on monocrystalline silicon substrates by direct current magnetron sputtering. The morphology and structure of thin films were analyzed by SEM, AFM, XRD and TEM. The experimental results indicate that the addition of alloy elements leads to the formation of a more uniform and finer-grained film structure. X-ray diffraction analysis shows that the alloy films are composed of two phases: α-Ti and |3-Ti. In addition, Ti and TiMo thin films are of (002) preferential orientation, as to TiMoY and TiMoYAl films, the (002) preferential orientation intensity decreases rapidly while (101) orientation intensity increases. Moreover, the mechanical properties of thin films were tested, and the results show that the alloy films exhibit higher hardness.关键词
磁控溅射/Ti膜/合金化Key words
magnetron sputtering/ Ti films/ alloying分类
数理科学引用本文复制引用
马红伟,刘实,熊良银..合金化对溅射Ti膜材结构和力学性能的影响[J].原子能科学技术,2012,46(6):744-748,5.基金项目
国家自然科学基金资助项目(51171184) （51171184）
