中国光学2012，Vol.5Issue(3)：270-276,7.
0.6～1.55μm可见/近红外超宽带增透膜的研制
Design and fabrication of 0.6-1.55 μm visible/near infrared ultra-broad band antireflection coatings
摘要
Abstract
As for the operating requirements of spectrometer detector windows operating from visible to the infrared spectrum,the TiO2,M1 and SiO2 were chosen as coating materials with different refractive indexes and were designed into film stacks by various schemes.By using electron beam evaporation with ion beam assist deposition,the visible/near infrared ultra-broad band antireflective coatings with excellent optical properties,good repetition and firmness were prepared by parameter adjustment.The average transmittances of these coatings are better than 99% at（650±10） nm,900-1 100 nm and（1 470±10） nm,and better than 97% in 620-1 550 nm as a whole.It meets the actual requirements of the spectrometer detector windows well.关键词
光学薄膜/宽带增透膜/电子束蒸发/离子束辅助沉积Key words
optical thin film/broadband AR coating/electron beam evaporation/ion beam assisted deposition分类
数理科学引用本文复制引用
杨道奇,付秀华,耿似玉,杨永亮,潘永刚..0.6～1.55μm可见/近红外超宽带增透膜的研制[J].中国光学,2012,5(3):270-276,7.基金项目
广东省教育部产学研结合资助项目 （）
