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一种TiAlN多层膜制备新方法

李根 张高会 徐鹏 乔宪武 于明州 施远驰 司平占

中国计量学院学报2012,Vol.23Issue(2):193-197,5.
中国计量学院学报2012,Vol.23Issue(2):193-197,5.

一种TiAlN多层膜制备新方法

A new method for preparation of TiAIN multilayer films

李根 1张高会 1徐鹏 1乔宪武 1于明州 1施远驰 1司平占1

作者信息

  • 1. 中国计量学院理学院,浙江杭州310018
  • 折叠

摘要

Abstract

The TiAlN multilayer films were coated on the surface of magnesium alloy by using a novel multi-periodic composite processing technology. The surface morphology, the microstructure and the property of TiAlN multilayer films were analyzed by using an optical microscope, an X-ray diffraction, an atomic force microscope and a friction-abrasion testing machine. The results show that the TiAlN multilayer film formed on magnesium alloy possesses a smooth and compact surface as well as reduced surface porosity with the surface roughness of 42. 28 nm, and is composed of TiAlN strengthening phase. The wear resistance of the multilayer film is improved ; but its friction coeffient is similar to that of untreated magnesium alloy.

关键词

镁合金/磁控溅射/离子注入

Key words

magnesium alloy/ magnetron sputtering/ ion implantation

分类

矿业与冶金

引用本文复制引用

李根,张高会,徐鹏,乔宪武,于明州,施远驰,司平占..一种TiAlN多层膜制备新方法[J].中国计量学院学报,2012,23(2):193-197,5.

中国计量学院学报

OACHSSCD

2096-2835

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