材料工程Issue(7)：92-96,5.
非对称双极脉冲反应磁控溅射制备TiN/NbN多层膜
TiN/NbN Multilayers Prepared by Asymmetrical Bipolarpulsed Reactive Magnetron Sputtering
摘要
Abstract
TiN /ZrN multilayers with different modulation periods were prepared by asymmetrical bipolar pulsed reactive magnetron sputtering. The microstructure, mechanical properties and fracture characteristics of multilayers were investigated by X-ray diffraction, scanning electron microscopy and nonoindentation. The results show that the nanohardness reaches to 43GPa at modulation period 19. 86nm. The fracture morphology of TiN/NbN multilayer was observed by SEM after three-point bending test, which reveals that the cracks in the multilayer have a tendency of deflection at the interfaces and thus a higher cracking resistance of the multilayer can be induced.关键词
纳米多层膜/力学性能/调制周期Key words
nanomultilayers/mechanical property/modulation period分类
通用工业技术引用本文复制引用
黑立富,徐俊波,陈良贤,李成明,吕反修..非对称双极脉冲反应磁控溅射制备TiN/NbN多层膜[J].材料工程,2012,(7):92-96,5.基金项目
国家自然科学基金项目(51102013) （51102013）
