高技术通讯2012，Vol.22Issue(4)：436-440,5.DOI:10.3772/j.issn.1002-0470.2012.04.016
基于氧化钌微电极的MEMS微型超级电容器的设计与制作
Design and fabrication of a RuO2 microelectrode-based micro-supercapacitor
摘要
Abstract
A RuO2 micro-supercapacitor with a side-by-side electrode configuration structure was designed and fabricated. It was composed of the micro-structure, the micro-electrode, and the functional RuO2 film on the electrode. The micro-structure was made by the MEMS technology, while the micro-electrode was made by electroplating the functional RuO2 film on the surface of the current collector. The electrochemical test results showed that the micro-supercapacitor had the specific capacity of 0.012F · cm-2 and the energy density of 0.006J · cm-2. The performance of the RuO2-CNT (carbon nanotube) composite functional film was studied. The cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS) curves showed that compared with the RuO2 film, the RuO2-CNT composite film greatly decreased the internal resistance, and improved the energy-storage density and the charge-CNT discharge quality of the micro-capacitor. Anyway, the micro-capacitor can satisfy the energy requirements of a lot of microsystems for its great stability and discharge power.关键词
微电子机械系统(MEMS)/微型超级电容器/RuO2/碳纳米管/复合功能薄膜Key words
micro electro mechanical systems (MEMS)/ micro-supercapacitor/ RuO2/ carbon nanotubes/ functional nanocomposite films引用本文复制引用
周扬,王晓峰..基于氧化钌微电极的MEMS微型超级电容器的设计与制作[J].高技术通讯,2012,22(4):436-440,5.基金项目
国家自然科学基金(50905096)资助项目. （50905096）
