黑龙江科技学院学报2012，Vol.22Issue(3)：297-302,6.
飞秒激光在蓝宝石晶体表面加工微细结构的实验研究
Experimental study on femtosecond laser micromachining of microstructures on sapphire
摘要
Abstract
Aimed at addressing more difficult mechanical and chemical corrosion processing of sapphire crystal marked by high hardness and abrasion resistance, this paper introduces an experimental study on the fine structure processing of sapphire crystal surface using femtosecond laser pulses with a wavelength of 780 nm, frequency of 1 kHz, and pulse width of 164 fs. The study involves the calculation of ablation threshold and effective ablation radius due to ablation of sapphire crystal by femtosecond laser used two ablation states through static irradiation of sapphire crystal surface using femtosecond laser and the relation between pulse energy and diameter in holes produced by femtosecond laser. The paper describes the way the relation between the width and depth of the groove and key parameters of femtosecond laser is obtained by fabricating microgrooves under different experimental conditions, based on line-scanning experiment. Results reveal that the remarkable improvement in the surface quality of the fabricated microgrooves could be achieved by increasing the number of laser scans, thus leaving virtually no effect on the width and depth of the microgroove. The production of the cleaner tiny structures in the sapphire crystal surface by scanning along the track using focused femtosecond laser beam provides guidance for the precision machining of micro-structures.关键词
飞秒激光/蓝宝石晶体/烧蚀阈值/微槽加工/微结构加工Key words
femtosecond laser/sapphire/ablation threshold/microgroove fabrication/microstructure fabrication分类
电子信息工程引用本文复制引用
齐立涛,胡金平,于信伟..飞秒激光在蓝宝石晶体表面加工微细结构的实验研究[J].黑龙江科技学院学报,2012,22(3):297-302,6.基金项目
黑龙江省留学归国人员科学基金项目 （）
