机械科学与技术2012，Vol.31Issue(7)：1156-1160,5.
基于Wavelet-Galerkin法的微机械谐振器件挤压膜阻尼求解方法研究
A Method for Calculating Squeeze Film Damping of Micro-mechanical Resonator Device Based on Wavelet-Galerkin Method
刘宗斌 1刘相法 2周勇1
作者信息
- 1. 江苏省特种设备安全监督检验研究院无锡分院,无锡214000
- 2. 潍坊科技学院,潍坊262700
- 折叠
摘要
Abstract
Correctly predicting the squeeze film damping is of utmost importance for designing a micro-electro-me- chanical system（MEMS）. We use the Wavelet-Galerkin method to calculate the squeeze film damping of its mico- mechanical resonator device. We set up its squeeze film damping model and work out its differential equations and boundary conditions. Then we carry out some necessary simplification of the equations. We use the Daubechies wavelet to expand the fluid pressure response of the MEMS, assuming that one input is known. Finally, we calcu- late the expansion coefficient with the Wavelet-Galerkin method so as to obtain the approximate solutions of the equations. In view of the fact that the Daubechies wavelet has no analytical expression and has strong oscillation, we also calculate the correlation coefficient, which is the derivation and integral of the wavelet involved in the Wavelet-Galerkin method. We use our method to calculate the model with given parameters and compare the calcu- lated results with those obtained with the traditional methods. The comparison results show that our method is effec- tive for analyzing squeeze film damping and has a simple calculation process and fast calculation sneed.关键词
挤压膜阻尼/Wavelet-Galerkin/关联系数/Daubechies小波Key words
squeeze film damping/wavelet-Galerkin method/correlation coefficient/daubechies wavelet/micro-electro-mechanical system(MEMS)分类
机械制造引用本文复制引用
刘宗斌,刘相法,周勇..基于Wavelet-Galerkin法的微机械谐振器件挤压膜阻尼求解方法研究[J].机械科学与技术,2012,31(7):1156-1160,5.
