西华大学学报（自然科学版）2012，Vol.31Issue(3)：77-80,4.
热处理工艺参数对TiO2成膜性的影响
The Impact of Heat Treatment Process and Parameters on TiO2 Film-forming
摘要
Abstract
TiO2 finis were prepared by the sol - gel method using spin-coating process with n-bulyl titanate, acetic acid, acetylac-etone, ethanol, deionized water as raw material. Hie process parameters for obtaining continuous and uniform TiO2 thin films include the speed of spin-coating at 3000r/min, the pretreatment temperature at 80℃ (10min), the heating rate from room temperature to 200X1 at 0. 5℃/min and 3℃/min at high-temperature. Crystalline films with anatase structure can be obtained after annealing at 500℃ and the crystallite size of TiO,film is in the range of 30 - 80 run.关键词
溶胶-凝胶/TiO2/锐钛矿结构/热处理工艺参数Key words
Sol-gel/ TiO2/ anatase structure/ heat treatment processing parameter分类
数理科学引用本文复制引用
张静,丁士华,杨晓静,宋天秀,涂伟,王红妮..热处理工艺参数对TiO2成膜性的影响[J].西华大学学报（自然科学版）,2012,31(3):77-80,4.基金项目
国家自然科学基金(11074203) （11074203）
教育部春晖计划(Z2009-1-61009) （Z2009-1-61009）
研究生创新基金(Ycjj201152) （Ycjj201152）
