物理学报2012，Vol.61Issue(13)：266-272,7.
飞秒激光抽运探测热反射法对金属纳米薄膜超快非平衡传热的研究
Study on ultra fast nonequilibrium heat transfers in nano metal films by femtosecond laser pump and probe method
摘要
Abstract
The reduction in size and the increase in speed of microelectronic device make the probability of nonequilibrium electron-phonon phenomena become greater, leading to the increase of thermal resistance in the device. The measurement of electron-phonon coupling factor in material resistance increasingly becomes important for accurate thermal treatment. The femtosecond laser pump and probe method is used for studing the nonequilibrium heat transfer in nano metal films with different thicknesses. Exploring parabolic two-step model （PTS） to fit the experimental data. During the fitting process, we considered the proportional relationship between the changes of electron temperature and phonon temperature, which affects the reflectivity. By studying the different thicknesses of Ni and A1 films electron-phonon coupling factors, we find that the electron-phonon coupling factor does not change with film thickness. In addition, the experimental result verifies that the reflectivity of probe laser is affected by electron temperature and phonon temperature at the same time. Through the data analysis, we also get the influence coefficients of electron temperature and phonon temperature on reflectivity.关键词
纳米金属薄膜/电子-声子耦合/飞秒激光/热反射Key words
nano metal film/electron-phonon coupling/femtosecond laser/thermoreflectance分类
数理科学引用本文复制引用
朱丽丹,孙方远,祝捷,唐大伟..飞秒激光抽运探测热反射法对金属纳米薄膜超快非平衡传热的研究[J].物理学报,2012,61(13):266-272,7.基金项目
国家重大科学研究计划项目 （）
国家自然科学基金（批准号：50876103）资助的课题 （）
