佛山科学技术学院学报：自然科学版2012，Vol.30Issue(4)：36-40,5.
基于白光干涉术的微器件三维表面形貌恢复研究
The recovery of the 3D surface profile of micro device through white-light interference
申路 1王宇华 2杨永强3
作者信息
- 1. 佛山科学技术学院机电工程系,广东佛山528000／华南理工大学机械与汽车工程学院,广东广州510640
- 2. 佛山科学技术学院机电工程系,广东佛山528000
- 3. 华南理工大学机械与汽车工程学院,广东广州510640
- 折叠
摘要
Abstract
White-light interference measurement is a very important method in optical measurement. In addition to the emphatical discussion of the process of this method conduction and related data processing, this paper introducedthe principle and the system of white-light interference measurement technology and proposed the method for the extraction of white-light interference signal envelop based on the interpolation of the local peak point. 3D surface profile images can he obtained through this method关键词
白光干涉/包络线/三维表面形貌Key words
white-light interference/envelope/3D surface profile分类
机械工程引用本文复制引用
申路,王宇华,杨永强..基于白光干涉术的微器件三维表面形貌恢复研究[J].佛山科学技术学院学报：自然科学版,2012,30(4):36-40,5.
