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具有C轴取向Al3+掺杂型ZnO薄膜的溶胶-凝胶法制备及其性能研究

郑春满 宋植彦 魏海博 帖楠 谢凯

国防科技大学学报2012,Vol.34Issue(3):33-37,5.
国防科技大学学报2012,Vol.34Issue(3):33-37,5.

具有C轴取向Al3+掺杂型ZnO薄膜的溶胶-凝胶法制备及其性能研究

The study on the preparation of Al3 + doped ZnO thin films with [002] oriented by sol-gel method and its properties

郑春满 1宋植彦 1魏海博 1帖楠 1谢凯1

作者信息

  • 1. 国防科技大学航天与材料工程学院,湖南长沙410073
  • 折叠

摘要

Abstract

The aluminum-doped ZnO thin films with [002] oriented were prepared using 2-methoxyethan as a solvent system by the sol-gel method. The composition, structure and optical properties were studied by means of Scanning Electron Microscopy ( SEM ), X-ray Diffraction (XRD) , Energy-dispersive X-ray microanalysis (EDX) and Spectral shape. The results showed that the ZnO films are hexagonal wurtrite structure, which consists of hexagonal rods growing along C axis. The resistivity of the aluminum-doped ZnO thin films decreases with the increase of the content of Al3+. In the visible region, the light Iransmittance of the ZnO thin films with 3% aluminum is about 90% , and the band gap is about 3. 25 eV, which can meet the material requirements for photoelectric devices such as photovoltaic solar cell.

关键词

溶胶-凝胶/ZnO薄膜/Al3+离子掺杂/制备

Key words

Sol-Gel/ ZnO thin film/ Aluminum-doped/ preparation

分类

化学化工

引用本文复制引用

郑春满,宋植彦,魏海博,帖楠,谢凯..具有C轴取向Al3+掺杂型ZnO薄膜的溶胶-凝胶法制备及其性能研究[J].国防科技大学学报,2012,34(3):33-37,5.

基金项目

湖南省自然科学基金资助项目(10JJ4045) (10JJ4045)

国防科技大学校预研资助项目(JC08-01-06) (JC08-01-06)

国防科技大学学报

OA北大核心CSCDCSTPCD

1001-2486

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