光学精密工程2012，Vol.20Issue(7)：1434-1439,6.DOI:10.3788/OPE.20122007.1434
电子束泵浦准分子激光放大器的双程光路自动准直
Automatic alignment of double paths in electron pumped excimer laser amplifier
摘要
Abstract
A kind of beam automatic alignment method used for double path amplification in an electron pumped excimer laser system was presented to ensure the beams from the amplifiers to transfer in a designed direction and irradiate on a target stably and accurately. As excimer laser amplifiers had no natural alignment references, an image-relaying structure with two cross-hairs was proposed, in which the cross-hair on the input beam was regarded as the near-field reference while the cross-hair of output beam was regarded as the far-field reference. Then, an alignment beam path was designed and the software was compiled. Furthermore, the automatic alignment experiment of double paths in electron pumped excimer laser amplifier was performed and the correlative influence factors and the alignment precision were analysed. Experimental results indicate that the automatic alignment system can achieve the beam transmission given in short time, the accuracy of alignment system is 0. 63 μrad and the beam maximum restoration error is 13. 75 μm. Obtained results satisfy the demand of beam alignment.关键词
激光技术/自动准直/电子束泵浦/准分子激光/激光放大器/叉丝Key words
laser technology/ automatic alignment/ electron pumping/ excimer laser/ laser amplifier/ cross-hair分类
信息技术与安全科学引用本文复制引用
王大辉,赵学庆,张永生,孙昱薇,赵军..电子束泵浦准分子激光放大器的双程光路自动准直[J].光学精密工程,2012,20(7):1434-1439,6.基金项目
激光与物质相互作用国家重点实验室基金资助项目(No.SKLLIM1106) （No.SKLLIM1106）
