光学精密工程2012，Vol.20Issue(7)：1500-1508,9.DOI:10.3788/OPE.20122007.1500
具有三层结构的SU-8胶V形微电热驱动器
SU-8 chevron electrothermal micro-actuator with three-layer structures
摘要
Abstract
To eliminate the out-of plane actuation of a SU-8 electrothermal micro-actuator, a novel SU-8 chevron electrothermal micro-actuator with a copper/SU-8/copper symmetrical structure was proposed. The mechanical model of the micro-actuator which contains the stiffness of a driven structure was established by using the stiffness matrix method. The geometric parameters of the micro-actuator were designed for a microgripper by using the established model. The designed micro-actuator was simulated by Ansys software and the simulation results verified the reasonability of the mechanical model. Then, the micro-actuator and the microgripper were fabricated by a simple process followed with a performance test. The test results show that when the temperature of the micro-actuator only increases 32. 93℃ in a driving voltage of 150 mV, the output displacement is 2. 5 μm and jaw gap change is 126 μm. During the operation processes, the out-of plane displacement of the tip is always lower than 500 nm. Finally, the micro-manipulation sequence of a SU-8 micro-part with a size of 1. 4 mm×135 μm×50 μm was carried out to verify the driving ability of the micro-actuator.关键词
SU-8胶/微电热驱动器/微夹钳/结构设计Key words
SU-8/ electrothermal micro-actuator/ microgripper/ structure design分类
机械制造引用本文复制引用
张然,褚金奎,王海祥,陈兆鹏..具有三层结构的SU-8胶V形微电热驱动器[J].光学精密工程,2012,20(7):1500-1508,9.基金项目
国家973重点基础研究发展计划资助项目(No.2011CB302101) （No.2011CB302101）
