光学精密工程2012，Vol.20Issue(8)：1740-1746,7.DOI:10.3788/OPE.20122008.1740
全相位谱分析在自混合干涉位移测量中的应用
Application of all-phase spectral analysis to self-mixing interferometry for displacement measurement
摘要
Abstract
A signal processing technique based on all-phase spectral analysis was proposed to reduce the displacement measurement error of a self-mixing interferometer. Self-mixing interference principle and signal processing technique were analyzed. First, the mathematical model and signal characteristics for the self-mixing interferometer were presented based on the model of laser oscillation cavity with three mirrors. Then, the displacement principle based on self-mixing interference was introduced. A all-phase spectral analysis was used to extract the phase of self-mixing interference signal to reconstruct the displacement of a reflective target and the signal processing algorithm was investigated with arithmetic simulation. Finally,an experiment system was established and the calibration result of bimorph PZT was presented. Experimental results indicate that the displacement error can be decreased to 4. 4 nm by using all-phase spectral analysis. It concludes that the all-phase spectral analysis can reduce the displacement error of the self-mixing interferometer to nanometer level without increasing the number of optical elements.关键词
自混合干涉/全相位谱分析/位移测量/压电陶瓷Key words
self-mixing interference/ all-phase spectral analysis/ displacement measurement/ piezo-e-lectric ceramics分类
机械制造引用本文复制引用
杨颖,李醒飞,寇科,王错..全相位谱分析在自混合干涉位移测量中的应用[J].光学精密工程,2012,20(8):1740-1746,7.基金项目
高等学校博士学科点专项科研基金资助项目(No.20110032110052) （No.20110032110052）
精密测试技术及仪器国家重点实验室开放基金资助项目(No.2006A10401006) （No.2006A10401006）
