光学精密工程2012，Vol.20Issue(9)：1904-1912,9.DOI:10.3788/OPE.20122009.1904
闪耀全息光栅离子束刻蚀工艺模拟及实验验证
Simulation and experiments of ion beam etching process for blazed holographic grating
摘要
Abstract
A simulation equation of surface etching for amorphous materials during ion beam etching was worked out based on the characteristic curve method, and a simulation program named BLAZING for the ion etching process was established according to the holographic grating. Then, the relation between the etching rate of amorphous materials and ion beam incidence was analyzed and optimized. Finally, an experiment was carried out to verify the simulation program with the ion beam etching. By adjusting the etching rate ratio from 2 : 1 to 1 ! 2 for a mask and substrate materials, four 1 200 I/mm blazed gratings with the right angle between 34°and 98°and the blazed angle about 8. 6° were fabricated, and the simulation error between the experimental data and the simulatisn data is less than 5%. By controlling the etching time from 6 min to 14 min, six 1 200 I/mm blazed gratings with the ridge between 0 nm and 211 nm and the same blazed angle of 8. 6° were fabricated, and the error mentioned above is less than 1%. The contrast results illustrate that the error of contour line between simulation and experimentation is less than 5% , and the error of etching ending time between simulation and experimentation is less than 1%. It concludes that the simulation program BLAZING can simulate the effect of different etching processes and different parameters on the etching results, and can predict and control the ion beam etching process.关键词
闪耀光栅/全息光栅/衍射效率/刻蚀模拟/离子束刻蚀Key words
blazed grating j holographic grating/ diffraction efficiency, etching simulation/ ion beametching分类
数理科学引用本文复制引用
吴娜,谭鑫,巴音贺希格,唐玉国..闪耀全息光栅离子束刻蚀工艺模拟及实验验证[J].光学精密工程,2012,20(9):1904-1912,9.基金项目
“863”重大项目(No.2010AA1221091001) （No.2010AA1221091001）
国家重大科研装备研制项目(No.ZBYZ2008-1) （No.ZBYZ2008-1）
中国科学院重大科研装备研制项目(No.YZ201005) （No.YZ201005）
吉林省科技发展计划资助项目(No.20070523、No.20086013) （No.20070523、No.20086013）
国家创新方法工作专项资助项目(No.2008IM040700) （No.2008IM040700）
