光学精密工程2012，Vol.20Issue(9)：1960-1966,7.DOI:10.3788/OPE.20122009.1960
超精密级二维工作台的自标定
Self-calibration for 2-D ultra-precision stage
摘要
Abstract
A two-dimensional self-calibration algorithm was developed to extract the stage systematic measurement error from a stage position measurement error. On the basis of the stage measurement error model, the algorithm got the iterative self-calibration model and the initial value by measuring five different views of an artifact on the stage, and then it established a complete iterative 2D self-calibration model. The algorithm was used to simulate a 2D stage with an accuracy of 0. 2 /jltci. The results show that the calibration error is 0. 33 nm without random measurement noises and is the same order of magnitude with random measurement noises. The actual self-calibration experiment on a stage with the given measuring accuracies of 2. 98 yxa and 3. 22 |um in x and y directions was performed, and obtained measuring accuracies are 2. 59 jum and 3. 14 jum in x and y directions, respectively. All results demonstrate that the proposed algorithm has a good robustness for the random measurement noises, and it is suitable for the calibrations for precision stages or ultra-precision stages.关键词
二维工作台/自标定/标记板/误差分析Key words
2-dimensional stage/ self-calibration/ grid plate/ error analysis分类
信息技术与安全科学引用本文复制引用
崔继文,刘雪明,谭久彬..超精密级二维工作台的自标定[J].光学精密工程,2012,20(9):1960-1966,7.基金项目
国家自然科学基金资助项目(No.51175128) （No.51175128）
国家863高技术研究发展计划资助项目(No.2012AA040508) （No.2012AA040508）
