光学精密工程2012，Vol.20Issue(9)：2087-2094,8.DOI:10.3788/OPE.20122009.2087
压电陶瓷执行器的类Hammerstein模型及其参数辨识
Hammerstein-based model of piezoceramic actuator and its identification
摘要
Abstract
For the effect of hysteretic linearity of a piezoceramic actuator on nano-positioning system, a modeling method based on Hammerstein model was proposed. The Hammerstein-based model for the piezoceramic actuator was established and its frequency dependence was described. By using the Hammerstein model, the piezoceramic actuator was taken as a static hysteretic model couple with a dyamic second-order system, and the former was described by the Preisach model and the latter was identified by the genetic algorithm. The experimental results show that the frequency dependence of the Hammerstein-based model is improved after adding the second order system, correspondingly, the error is decreased greatly. In 800 Hz, the absolute average tracking error of the Hammerstein-based model is 0. 339 2 jum, which is less than that of the Preisach model in 0. 888 1 f+-m.关键词
压电陶瓷执行器/迟滞非线性/Hammerstein模型/参数辨识Key words
piezoceramic actuator/ hysteresis nonlinearity/ Hammerstein model/ parameter identification分类
信息技术与安全科学引用本文复制引用
赖志林,刘向东,耿洁..压电陶瓷执行器的类Hammerstein模型及其参数辨识[J].光学精密工程,2012,20(9):2087-2094,8.基金项目
国家自然科学基金资助项目(No.10872030) （No.10872030）
国家重点基础研究发展计划(973计划)资助项目(No.2012CB720000) （973计划）
北京市自然科学基金资助项目(No.4122066) （No.4122066）
