计量学报2012，Vol.33Issue(4)：299-302,4.DOI:10.3969/j.issn.1000-1158.2012.04.03
压电式高频振动台的研制
Development of Piezoelectric High Frequency Vibrator
摘要
Abstract
According to the research status and application requirements for high frequency vibration standard at home and abroad, a new piezoelectric high frequency vibrator is developed. The high frequency range is from 2kHz to 50kHz. The maximum peak value of amplitude is 500nm. Optimum design of high frequency vibrator is described. Some important problems concerning the design of it are analyzed and reviewed. The issues discussed include functional description and choice of components of piezoelectric vibrator, optimization performance parameter of the piezoelectric stack, effects of contacting interfaces on the performances, and choice and effect of pre-stress of bolt in the vibrator. The main technical specifications of the high frequency vibrator and the results of comparison experiment are given.关键词
计量学/压电式高频振动台/压电叠堆/预应力/压电陶瓷Key words
Metrology/ Piezoelectric high frequency vibrator/ Piezoelectric stack/ Pre-stress/ Piezoelectric ceramics分类
通用工业技术引用本文复制引用
杨丽峰,于梅,徐爱华..压电式高频振动台的研制[J].计量学报,2012,33(4):299-302,4.基金项目
中国计量科学研究院青年基金(AKYQ0706) （AKYQ0706）
