机械科学与技术2012，Vol.31Issue(9)：1411-1419,9.
精密主动减振器技术研究现状与进展
Developments and Prospects of Active Vibration Isolator for Precision Equipment
摘要
Abstract
Environment vibration directly leads to dynamic performance degradation and becomes one of key impact factors on the precision equipment performance. Active vibration isolator is used to damp the environment vibration both from base disturbance and direct disturbance in order to maintain the stability of the payload of precision equipment. Active vibration isolators are classified into hard mounts and soft mounts according to its natural fre- quency. Hard mounts are commonly used to damp direct disturbance and structure mode of the payload with their high stiffness while soft mounts are used to isolate the base disturbance. The technological prospects about struc- tures of both soft mounts and hard mounts are given and some challenges and unsolved key technologies for the structure of active vibration isolator are proposed.关键词
主动减振器/精密设备/硬式主动减振器/软式主动减振器Key words
active vibration isolator/precision equipment/hard mounts/soft mounts分类
通用工业技术引用本文复制引用
廖飞红,李小平,陈学东,袁志扬,李巍..精密主动减振器技术研究现状与进展[J].机械科学与技术,2012,31(9):1411-1419,9.基金项目
基金项目：国家自然科学基金项目（50605025）和国家973计划项目（2009CB724205）资助 （）
