强激光与粒子束2012，Vol.24Issue(7)：1603-1607,5.DOI:10.3788/HPLPB20122407.1603
扫描质子微探针质子束刻写
Proton beam writing with scanning proton microprobe
摘要
Abstract
Proton beam writing(PBW) is a direct-writing technique that uses a highly focused MeV proton beam to pattern structures of micro- or nano-dimensions in a suitable resist material. The PBW instrumentation was established on the scanning proton microprobe beamline of Key Laboratory of Nuclear Analysis Techniques (Shanghai Institute of Applied Physics, CAS). The study of spin-coating resist layer and developing technology was carried out. A Haibao outline and a double-rectangular micro-structure were fabricated on the positive resist layers; the parallel lines and a crisscross micro-structure were fabricated on the negative resist layers.关键词
质子束刻写/扫描质子微探针/微结构/抗蚀剂/旋转涂胶Key words
proton beam writing/ scanning proton microprobe/ micro-structures/ resist/ spin-coating分类
数理科学引用本文复制引用
雷前涛,刘江峰,包良满,张仲建,余本海,李晓林..扫描质子微探针质子束刻写[J].强激光与粒子束,2012,24(7):1603-1607,5.基金项目
国家自然科学基金项目(10975176) （10975176）
中国科学院科研装备研制项目(YZ200937) （YZ200937）
河南省教育厅自然科学研究计划项目(2010A490001) （2010A490001）
国家青年科学基金项目(11005141) （11005141）
