强激光与粒子束2012，Vol.24Issue(8)：1856-1860,5.DOI:10.3788/HPLPB20122408.1856
混合离子束阴极真空弧等离子体鞘层特性
Sheath characteristics of vacuum arc plasma for mixed ion beam
摘要
Abstract
The dynamic sheath model and the analytic expression of the vacuum arc plasma for mixed ion beam are presented based on the collision less model. The variations of the sheath width and electric-field strength as the function of the ion density and substrate bias voltage are calculated respectively for H-Ti mixed ion beam. The phenomena of sheath breakdown and ion beam defocusing, which usually arise in the practical application, are analyzed. It is found that the stable operating region for the mixed ion beam extremely depends on the ion density and substrate bias voltage, and reducing the ion density and Increasing the substrate bias voltage can expand the stable operating region.关键词
混合离子束/真空弧/鞘层击穿/鞘层厚度Key words
mixed ion beam/ vacuum arc/sheath breakdown/sheath width分类
信息技术与安全科学引用本文复制引用
陈磊,金大志,石磊,谈效华,戴晶怡,胡思得..混合离子束阴极真空弧等离子体鞘层特性[J].强激光与粒子束,2012,24(8):1856-1860,5.基金项目
中国工程物理研究院电子工程研究所科技创新基金项目(S20090802) （S20090802）
