人工晶体学报2012，Vol.41Issue(2)：302-305,4.
预处理对超纳米金刚石薄膜表面质量的影响
Influence of Pretreatment on Surface Quality of Ultra-nanocrystalline Diamond Thin Films
摘要
Abstract
The pretreatments of diamond grinding and ultrasonic vibration on the silicon substrate were presented in this article. Substrate and UNCD films were characterized by surface profilometer, XRD, FE-SEM and Raman spectroscopy. The results showed that the surface roughness of ultra-nanocrystalline diamond films on silicon pretreated by diamond grinding was much higher than that by ultrasonically vibrating, because of the genetic characteristics of the substrate profile.关键词
超纳米金刚石/粗糙度/表面质量/遗传特性Key words
ultra-nanocrystalline diamond/roughness/surface quality/genetic characteristics分类
数理科学引用本文复制引用
黑立富,刘杰,刘金龙,李成明,宋建华,吕反修..预处理对超纳米金刚石薄膜表面质量的影响[J].人工晶体学报,2012,41(2):302-305,4.基金项目
国家自然科学基金资助项目(51102013/E0206) （51102013/E0206）
