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碳纳米管/金属接触改善方法的研究进展

陈长鑫 金铁凝 张亚非

无机材料学报2012,Vol.27Issue(5):449-457,9.
无机材料学报2012,Vol.27Issue(5):449-457,9.DOI:10.3724/SP.J.1077.2012.00449

碳纳米管/金属接触改善方法的研究进展

Progress in Improvement Methods of Carbon Nanotube/Metal Contact

陈长鑫 1金铁凝 1张亚非1

作者信息

  • 1. 上海交通大学 微米/纳米科学技术研究院,薄膜和微细技术教育部重点实验室,微米纳米加工技术国家级重点实验室,上海200240
  • 折叠

摘要

Abstract

Owing to its unique structure and excellent properties, carbon nanotube (CNT) has been widely used to construct various nanodevices. The contact between CNTs and metal electrodes plays a key role in CNT-based devices and directly influences device performance. Therefore, the improvement of the CNT/electrode contact is an important aspect in the study of CNT devices. In this paper, recent research progress on the improvement methods of the CNT/metal contact is reviewed. Typical contact optimization methods and their principles and processes are introduced. The resulting contact characteristics and device performances by applying these improvement methods are also discussed. On this basis, the features of these different improvement methods are compared.

关键词

碳纳米管(CNT)/碳纳米管/金属接触/接触电阻/碳纳米管场效应晶体管(CNTFET)/综述

Key words

carbon nanotube (CNT)/ carbon nanotube/metal contact/ contact resistance/ carbon nanotube field-effect transistor (CNTFET)/ review

分类

信息技术与安全科学

引用本文复制引用

陈长鑫,金铁凝,张亚非..碳纳米管/金属接触改善方法的研究进展[J].无机材料学报,2012,27(5):449-457,9.

基金项目

上海市青年科技启明星计划(10QA1403500) (10QA1403500)

全国优秀博士学位论文作者专项基金(201154) (201154)

高等学校博士学科点专项科研基金(200802481028) (200802481028)

韩国三星(Samsung)技术院全球研究拓展(GRO)计划项目 (Samsung)

"晨星学者奖励计划"SMC优秀青年教师项目(SMC2009GB16) (SMC2009GB16)

无机材料学报

OA北大核心CSCDCSTPCDSCI

1000-324X

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