物理学报2012，Vol.61Issue(16)：459-465,7.
退火温度对N＋注入ZnO：Mn薄膜结构及室温铁磁性的影响
Effects of the annealing temperature on microstructure and room-temperature ferromagnetism of N＋ ion-implanted ZnO：Mn thin film
摘要
Abstract
The Mn-N codoped ZnO thin films are fabricated on quartz glass substrates using the radio-frequency magnetron sputtering technique together with the direct N＋ ion-implantation. The effects of annealing temperature on microstructure and room-temperature ferromagnetism of the thin films are investigated. The results indicate that both divalent Mn2＋ and trivalent N3- ions are incorporated into ZnO lattice. As the annealing temperature increases, the lattice distortion induced by N＋ ion-implantation can decrease, and the N3- may escape from the film, which results in the reducing of acceptor （No） concentration. Ferromagnetism is observed in the （Mn,N）-codoped ZnO thin film at 300 K and found to be the sensitive to the acceptor concentration. The mechanism of roomtemperature ferromagnetism in the ZnO：（Mn, N） is discussed based on the bound magnetic polaron model.关键词
ZnO：Mn薄膜/离子注入/晶体结构/室温铁磁性Key words
ZnO:Mn thin films/ion-implantation/crystal structure/room-temperature ferromagnetism分类
信息技术与安全科学引用本文复制引用
杨天勇,孔春阳,阮海波,秦国平,李万俊,梁薇薇,孟祥丹,赵永红,方亮,崔玉亭..退火温度对N＋注入ZnO：Mn薄膜结构及室温铁磁性的影响[J].物理学报,2012,61(16):459-465,7.基金项目
重庆市自然科学基金（批准号：CSTC.2011BA4031）资助的课题. （）
