厦门大学学报（自然科学版）2012，Vol.51Issue(3)：353-359,7.
全对称谐振式压力传感器结构设计与仿真分析
Design and Simulation of Fully-symmetrical Resonant Pressure Sensor
摘要
Abstract
A fully-symmetrical resonant pressure sensor based upon lateral drive is presented. Resonant structure adopts lateral comb capacitance drive.which can ensure the linear characteristic of driving force,and obtain higher quality factors because its air damping is a kind of slide-film damping. In addition, the differential capacitance structure of the design can further improve the detection sensitivity of device. According to the simulation analysis by ANSYS 10.0,the law by which the natural frequency of the resonator is influenced by the structural parameters can be summarized, the specific size of resonant pressure sensor with a range of 0 to 550 kPa is confirmed,and its sensitivity has reached up to 22. 602 Hz/kPatthe impact of temperature on the natural frequency of the resonator is analyzed, knowing that the temperature coefficient of thermal sensitivity is — 1. 823 3 Hz/℃ and on the condition that temperature is — 20 ℃ to 60 ℃,it provides basis for temperature compensation; Finally.based on the analysis on the frequency domain response characteristics of the resonator, ultimately the curve of frequency domain characteristics has been drawn up and the quality factors of sensor under different damping ratios are identified,it offers reliable reference for the choice of vacuum whose vacuum encapsulation of resonant pressure sensor.关键词
谐振式/压力传感器/灵敏度/品质因子Key words
resonant/pressure sensor/sensitivityjquality factor分类
信息技术与安全科学引用本文复制引用
江毅文,杜晓辉,占瞻,徐布磊,吕文龙,王凌云,孙道恒..全对称谐振式压力传感器结构设计与仿真分析[J].厦门大学学报（自然科学版）,2012,51(3):353-359,7.基金项目
国家自然科学基金项目(51035002,50875222) （51035002,50875222）
中央高校基本科研业务费专项资金项目(2010121039) （2010121039）
