成都大学学报：自然科学版2012，Vol.31Issue(3)：267-269,3.
干湿法腐蚀工艺条件下CdTe薄膜光谱研究
Research on Spectrum of Conditions of Dry CdTe. Solar Cells Under and Wet Etching
摘要
Abstract
The surface of CdTe thin films was etched by plasma bombardment sputtering and corroded by methyl bromide. The two types of spectnam properties of CdTe thin films were compared under the two con- ditions. The results show that plasma bombardment sputtering can remove the surface oxide layer completely and make the partiches of the thin films more even and compact, which show that compared with methyl bromide corrosion, it can improve micro-roughness of the surface and improve the quality of the crystal par- ticles and the adhesion of the film.关键词
等离子体/刻蚀/CdTe薄膜/太阳电池Key words
plasma/etching/CdTe thin film/solar cells分类
信息技术与安全科学引用本文复制引用
宋慧瑾,鄢强..干湿法腐蚀工艺条件下CdTe薄膜光谱研究[J].成都大学学报：自然科学版,2012,31(3):267-269,3.基金项目
国家自然科学基金（60976052）、四川省教育厅青年科研课题（10ZBl44）资助项目. （）
