材料工程Issue(8)：30-32,38,4.
磁控溅射掺碳TiB2薄膜的Raman光谱与摩擦行为
Raman Spectrum and Friction Behaviors of Carbon-doped TiB2 Films Prepared by Magnetron Sputtering
摘要
Abstract
The carbon-doped TiB2(TiB2-C) film (SiC film and Ti film as interlayer) was successfully deposited on Crl2MoV steel substrate using magnetron sputtering technology. The carbon-doping effect on Raman spectrum, nano-indentation and friction behavior of TiB2 film was investigated. The results showed that higher or lower sputtering power of carbon can not lead to the doped-carbon presented in manner of DLC (diamond-like carbon). The doped-carbon decreased the nano-hardness and elastic modulus of TiB2 film. As sliding against steel balls (4mm in diameter) under room temperature and dry frictional condition, the doped carbon presented in manner of DLC can effectively decrease the friction coefficient of TiB2 film.关键词
掺碳/TiB2薄膜/中间层/摩擦因数/磁控溅射Key words
carbon-doped/TiB2 film/interlayer/friction coefficient/magnetron sputtering分类
矿业与冶金引用本文复制引用
许晓静,盛新兰,张体峰,刘敏,辛喜玲..磁控溅射掺碳TiB2薄膜的Raman光谱与摩擦行为[J].材料工程,2012,(8):30-32,38,4.基金项目
江苏大学"拔尖人才工程"培育基金资助项目(1211110001) （1211110001）
江苏省摩擦学重点实验室基金资助项目(kjsmcx06005) （kjsmcx06005）
