硅酸盐通报2012，Vol.31Issue(4)：916-919,4.
磁控溅射法制备铁氧体薄膜的磁性能研究
Study on Magnetic Properties of Ferrite Film Deposited by Magnetron Sputtering
摘要
Abstract
The nano-crystalline Ni0.3 Co0.2 Zn0.5 Fe2O4/SiO2 composite powder was prepared by sol-gel method and the target was prepared with the composite powder. The ferrite thin films were deposited on glass and monocrystalline silicon substrates by magnetron sputtering, and the magnetic properties were studied. The results showed the NiZnCo ferrites/SiO2 composite films had good soft magnetic properties. In the same sputtering process conditions, the film deposited on silicon substrate had higher saturation magnetization than the film deposited on glass. However,they both had small coercive force. The saturation magnetization was obviously enhanced and the soft magnetism was improved after post-annealing treatment.
关键词
铁氧体薄膜/软磁性能/磁控溅射/饱和磁化强度/矫顽力Key words
ferrite film/ soft magnetism/ magnetron sputtering/ saturation magnetization/ coercive force分类
信息技术与安全科学引用本文复制引用
王乾,徐小玉..磁控溅射法制备铁氧体薄膜的磁性能研究[J].硅酸盐通报,2012,31(4):916-919,4.
