测试技术学报2012，Vol.26Issue(5)：422-428,7.DOI:10.3969/j.issn.1671-7449.2012.05.011
基于COMSOL的声表面波器件仿真
Simulation of Surface Acoustic Wave Device Based on COMSOL
摘要
Abstract
The surface acoustic wave (SAW) device is applied broadly to communication, sensing and radio frequency identification, etc Based on the finite element method, the SAW device was simulated by COMSOL software. Starting from the model building, we progressively analyzed four structures of SAW device which are piezoelectric substrate without electrode, piezoelectric substrate/inter-digital transducer (IDT), piezoelectric substrate/IDT/non-piezoelectric thin film, piezoelectric substrate / IDT/ non-piezoelectric thin film/ liquid. The research results are as follows: By the electrode effect of the IDT, the resonant and anti-resonant frequencies are extracted, and they decrease with the increased width and height of IDT. By loading a layer of thin film, the frequency of the device also decreases with the increase of the film thickness. By loading liquid as liquid density measurement, the thickness of the non-piezoelectric thin film can be optimized through the SAW device's frequency change sensitivity to liquid density. The above mentioned conclusions provide the guidance for the design and production of the SAW device.关键词
声表面波器件/有限元/叉指换能器/特征频率/薄膜/液体Key words
surface acoustic wave device/ finite element analysis/ inter-digital transducer/ resonant frequency/ thin film/ liquid分类
信息技术与安全科学引用本文复制引用
阮鹏,陈智军,付大丰,张亦居,王萌阳..基于COMSOL的声表面波器件仿真[J].测试技术学报,2012,26(5):422-428,7.基金项目
国家自然科学基金(51005121) （51005121）
航空科学基金(2010ZD52045) （2010ZD52045）
江苏省科技支撑计划工业项目(BE2011180) （BE2011180）
南京航空航天大学研究生创新基金 （）
江苏高校优势学科建设工程资助项目 （）
