物理学报2012，Vol.61Issue(17)：396-402,7.
氘化及氦离子注入对钪膜的表面形貌和相结构的影响
The influence of deuteration and helium-implantation on the surface morphology and phase structure of scandium thick film
摘要
Abstract
The effects of deuteration and helium-implantation on the surface morphology and phase structure of scandium （Sc） thick film are investigated by X-ray diffraction （XRD）, Scanning Electron Microscopy （SEM） and Atomic Force Microscopy （AFM） methods. The preferred orientation of （002） crystal plane is observed for both films deposited on substrates of monocrystalline-silicon and polished- molybdenum. A great number of holes appear on surface after deuteration and the grain size of ScD2 is bigger than that of Sc, whereas a few ScDo.33/Sc grains with relatively small grain size retain inside crystal. The surface morphologies of scandium and scandium deuteride films are slightly affected by helium-implantation. The formation of helium bubbles with a preferred orientation in the crystal lattice of scandium and scandium deuteride, generated by the aggregation of ion-implanted helium, causes the corresponding diffraction peaks of scandium and scandium deuteride phase to shift towards smaller angles.关键词
钪膜/氘化/氦离子注入/表面形貌Key words
scandium film/deuteration/helium-implantation/surface morphology分类
数理科学引用本文复制引用
彭述明,申华海,龙兴贵,周晓松,杨莉,祖小涛..氘化及氦离子注入对钪膜的表面形貌和相结构的影响[J].物理学报,2012,61(17):396-402,7.基金项目
国家自然科学基金委员会一中国工程物理研究院联合基金（批准号：10976007）,国家自然科学基金（批准号：50871106）和中国工程物理研究院科学技术发展基金（批准号：2009A0301015）资助的课题 （）
