物理学报2012，Vol.61Issue(21)：249-252,I0003,5.
质子注入能量对垂直腔面发射激光器的阈值和功率的影响
The effects of proton implant energy on threshold and output power of vertical cavity surface emitting laser
摘要
Abstract
A method of balancing the output power and threshold current property of vertical cavity surface emitting laser is studied. The relationship between proton implantation energy and device performance is analyzed by simulation and experiment. It is found that a higher injection energy can destroy the active region, thus reducing the output power property. The threshold current will be increased since a lower injection energy may weaken the restriction on the injection current. The results indicate that 315 keV injection energy is the right choice for our device structure. The output power and threshold current obtained under 10 μm aperture are 1.7 mW and 4.3 mW, respectively.关键词
质子注入能量/垂直腔面发射激光器/功率/阈值Key words
proton injection energy/vertical cavity surface emitting laser/output power/threshold current分类
信息技术与安全科学引用本文复制引用
毛明明,徐晨,魏思民,解意洋,刘久澄,许坤..质子注入能量对垂直腔面发射激光器的阈值和功率的影响[J].物理学报,2012,61(21):249-252,I0003,5.基金项目
国家高技术研究发展计划,(批准号： 2008AA03Z402), 国家自然科学基金,(批准号： 61076044)和北京市自然科学基金,(批准号： 4092007, 4102003, 4112006)资助的课题. （批准号： 2008AA03Z402）
