物理学报2012，Vol.61Issue(21)：336-342,7.
射频功率对辉光放电H2/C4H8等离子状态的影响
Influence of radio-frequency power on the state of H2/C4H8 glowing discharge plasma
摘要
Abstract
Taking advantage of the glowing discharge technology and plasma mass spectrometry diagnosis technology, the variation rules of positive ion species and energy with power in H2/C4H8 mixture gas are investigated. The characteristic ions are measured and their forming process is discussed. The results show that the intensity of the C-H segment ions in the H2/C4H8 plasma increases with radio-frequency (RF) power increasing, the intensity reaches a maximum at an RF power of 20 W, and then reduces after the RF power has reached 25 W. The relative concentration of m/e 57 (C4H9+) is highest when the power is less than 10 W, and when the power is more than 10 W, the relative concentration of m/e 39 (C3H3+) reaches a maximum. The energy of the C-H segment ions increases gradually with the increase of RF power. The qualitative analyses of H2/C4H8 plasma composition and energy will be beneficial to improving the fabrication technology of glowing discharge polymer coating.关键词
辉光放电聚合技术/等离子体/质谱诊断Key words
the glowing discharge technology/plasma/mass spectrometry diagnosis分类
数理科学引用本文复制引用
李蕊,何智兵,何小珊,牛忠彩,杨向东..射频功率对辉光放电H2/C4H8等离子状态的影响[J].物理学报,2012,61(21):336-342,7.基金项目
国家自然科学基金,(批准号：10974139,10964002)资助的课题. （批准号：10974139,10964002）
