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p-GaN/p-AlxGa1-xN异质结界面处二维空穴气的性质及其对欧姆接触的影响

王晓勇 种明 赵德刚 苏艳梅

物理学报2012,Vol.61Issue(21):405-410,6.
物理学报2012,Vol.61Issue(21):405-410,6.

p-GaN/p-AlxGa1-xN异质结界面处二维空穴气的性质及其对欧姆接触的影响

Two-dimensional hole gas in p-GaN/p-AlxGa1-xN heterojunctions and its influence on Ohmic contact

王晓勇 1种明 1赵德刚 2苏艳梅1

作者信息

  • 1. 中国科学院半导体研究所、纳米光电子实验室,北京100083
  • 2. 中国科学院半导体研究所、集成光电子国家重点实验室,北京100083
  • 折叠

摘要

Abstract

In this paper, the characteristics of the two-dimensional hole gas (2DHG) in p-GaN/p-AlxGa1-xN heterojunction is investigated in detail, based on self-consistent solutions of one-dimensional Poisson and Schr?dinger equations. The valence band structures and the 2DHG distributions are calculated in the cases of different Al components and piezoelectric polarization effects. Then, the influences of Al components and piezoelectric polarization effects on 2DHG are analysed specifically. The results show that with the increase of Al component, the quantum well at the heterojunction interface turns deeper and narrower, which leads to an accelerated growth of the 2DHG peak density and a line increase of the 2DHG sheet concentration. Furthermore, piezoelectric polarization effects also make the quantum well at the heterojunction interface deeper and narrower, at the same time, the Fermi level moves close to the top of the barrier and the location of peak density moves close to the heterojunction interface. In addition, the influences of valence band offset and acceptor doping concentration on 2DHG are relatively small. Ohmic contact of p-AlxGa1-xN is fabricatea with the 2DHG, and its I-V characteristic is much better than that without the 2DHG, which indicates that the 2DHG can significantly improve the performance of p-AlxGa1-xN ohmic contact.

关键词

p-AlGaN/压电极化/二维空穴气/欧姆接触

Key words

p-AlGaN/piezoelectric polarization/two-dimensional hole gas/Ohmic contact

分类

信息技术与安全科学

引用本文复制引用

王晓勇,种明,赵德刚,苏艳梅..p-GaN/p-AlxGa1-xN异质结界面处二维空穴气的性质及其对欧姆接触的影响[J].物理学报,2012,61(21):405-410,6.

基金项目

国家自然科学基金,(批准号:60776047)和国家高技术研究发展计划,(批准号:2007AA032401)资助的课题. (批准号:60776047)

物理学报

OA北大核心CSCDCSTPCDSCI

1000-3290

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