原子能科学技术2012，Vol.46Issue(8)：982-986,5.
衬底材料及基底温度对Sc膜形貌、结构的影响
Effect of Substrate Material and Substrate Temperature on Morphology and Microstructure of Sc Films
摘要
Abstract
Scandium films were grown on various substrates (Mo, polished Mo, Si (111)) by electron beam deposition at different substrate temperatures. The influence of substrate material and substrate temperature on the microstructure and morphology of Sc films was revealed by the XRD, SEM and AFM results. It is found that the surface of Sc film deposited on polished Mo substrate is rather smooth, and with Stranski-Kras-tanov growth mode. However, the surface becomes coarse and grows in a Volmer mode when deposited on the rolled Mo substrate. Increasing the substrate temperatures is beneficial to the growth of c-axis orientation of Sc films grown on polished Mo substrate. While, the phase structure of films on Si substrates changes from Sc to the ScSi compound with increasing temperature to 650 癈 , which is harmful to the property of hydrogen absorption.关键词
电子束蒸发/钪/薄膜/衬底材料/基底温度Key words
electron beam evaporation/ scandium/ film/ substrate material/ substrate temperature分类
数理科学引用本文复制引用
吴清英,罗顺忠,陈静,龙兴贵,邴文增..衬底材料及基底温度对Sc膜形貌、结构的影响[J].原子能科学技术,2012,46(8):982-986,5.基金项目
中国工程物理研究院科学技术发展基金资助项目(2009A0301015) （2009A0301015）
自然科学基金面上项目资助(50871106) （50871106）
