原子能科学技术2012，Vol.46Issue(8)：1014-1018,5.
立式靶丸AFM表面轮廓仪系统精度测试
Measure Precision Analysis of Capsule Vertical-AFM Surface Profiler System
摘要
Abstract
A capsule surface profiler system based on vertical spindle structure and atomic force microscope (AFM) was developed, and its systematic measurement tests were carried out. In order to evaluate the measurement uncertainty, the experimental studies mainly included the air-bearing spindle rotation run out error test, the system static noise test, and the comprehensive test. The rotary precision of air bearing was tested and the error curve of the spindle was obtained with a standard ball and two-step separation method. Further, this error curve was eliminated as in a systematic error. Comprehensive measurement tests of the system prove that the noise peak value of this system is about 22 nm and its RMS is about 5. 2 nm during the measurement process.关键词
ICF靶丸/AFM/表面轮廓仪/立式轴系结构/测量精度Key words
ICF capsule/ AFM/ surface profiler/ vertical spindle structure/ measure precision分类
机械制造引用本文复制引用
赵学森,高党忠,马小军,孟婕,唐永建,张林,孙涛..立式靶丸AFM表面轮廓仪系统精度测试[J].原子能科学技术,2012,46(8):1014-1018,5.基金项目
国家自然科学基金资助项目(51005061) （51005061）
教育部新教师博士点基金资助项目(20092302120006) （20092302120006）
