首页|期刊导航|半导体学报（英文版）|Effects of manufacturing errors on the characteristics of a polymer vertical coupling microring resonator
半导体学报（英文版）2012，Vol.33Issue(10)：58-61,4.DOI:10.1088/1674-4926/33/10/104007
Effects of manufacturing errors on the characteristics of a polymer vertical coupling microring resonator
Effects of manufacturing errors on the characteristics of a polymer vertical coupling microring resonator
摘要
Abstract
The effects of manufacturing errors on transmission characteristics are analyzed for a polymer vertical coupling microring resonator.Calculated results show that the errors cause a shift and shape change of the transmission spectrum compared to the designed case without errors.Furthermore,accumulation and compensation for the errors is researched.In order to realize the normal filtering for the fabricated microring resonator device,some allowed errors are discussed.关键词
microring resonator/ manufacturing error/ polymer/ transmission spectrumKey words
microring resonator/ manufacturing error/ polymer/ transmission spectrum引用本文复制引用
Wang Yuhai,Qin Zhengkun,Wang Chunxu,Wang Lizhong..Effects of manufacturing errors on the characteristics of a polymer vertical coupling microring resonator[J].半导体学报（英文版）,2012,33(10):58-61,4.基金项目
Project supported by the Science and Technology Development of Jilin Province,China (Nos.20110320,201201078). （Nos.20110320,201201078）
