表面技术2012，Vol.41Issue(5)：7-10,4.
掺Ti量对类金刚石薄膜机械性能的影响
The Effect of Ti Content on Mechanical Properties of DLC Films
摘要
Abstract
Using unbalanced magnetron sputtering technique, diamond-like carbon films with different titanium contents(Ti-DLC) were deposited on stainless steel substrates by changing Ti target supttering current. Investigated the influences of Ti content on microhardness, elastic modulus, film-substrate cohesion, fracture toughness, friction and wear behavior of films. Results showed that the hardness of the Ti-DLC films increases obviously compared with the pure DLC films. In the meantime, the hardness of the Ti-DLC films increases first and then decreases with the increase of the Ti target sputtering current and reaches the highest when Ti target sputtering current is increased to 1. 5 A. Film-substrate cohesion and fracture toughness of the films are improved by depositing some Ti. The friction coefficient of DLC films decreases significantly with the deposition of Ti .关键词
非平衡磁控溅射/掺Ti类金刚石薄膜/结合强度/摩擦磨损性能Key words
unbalanced magnetron sputtering/ Ti-DLC/ cohesion/ tribological and wear properties分类
信息技术与安全科学引用本文复制引用
祝闻,冉春华,金义栋,聂朝胤,王振林..掺Ti量对类金刚石薄膜机械性能的影响[J].表面技术,2012,41(5):7-10,4.基金项目
重庆市科技攻关项目(CSTC,2008AC4017) （CSTC,2008AC4017）
