硅酸盐通报2012，Vol.31Issue(5)：1185-1189,5.
SrTiO3薄膜制备技术研究进展
Research Development on Preparation of SrTiO3 Thin Film
摘要
Abstract
SrTiO3 thin film has been paid more attention for its excellent capability. Properties and application of SrTiO3 thin film were introduced firstly, then the preparation technic and research actuality with physical and chemical method were summarized in detail, at last the prospect of research field of SrTiO3 thin film preparation and organ was put forward.关键词
SrTiO3薄膜/制备/进展Key words
SrTiO3 thin film preparation/ development分类
数理科学引用本文复制引用
刘剑,郝斌,董秀珍,李悦,王伟志..SrTiO3薄膜制备技术研究进展[J].硅酸盐通报,2012,31(5):1185-1189,5.基金项目
唐山市科学技术研究与发展指导计划项目(No.11110214a) （No.11110214a）
唐山学院科研项目(No.11001B) （No.11001B）
