光学精密工程2012，Vol.20Issue(10)：2123-2131,9.DOI:10.3788/OPE.20122010.2123
使用优化的固着磨料磨盘全口径加工碳化硅反射镜
Fabrication of SiC mirror in full aperture with optimized fixed abrasive polishing pad
摘要
Abstract
To improve the fabricating quality of a SiC aspheric mirror, this paper researched the removal function in fixed abrasive technology involved in the mirror fabrication. The removal function was tested in the earlier round-pellet polishing pad, then a filling factor was introduced to evaluate the removal function obtained from the experiments and the relation between round-pellet pad structure and filling factor was established. To improve the filling factor and the characteristic of polishing pad, the pad structure was optimized according to the experimental results of the round-pellet pad . The removal function of the new polishing pad was simulated by MATLAB. A stability experiment in the full aperture was performed, and the both fixed abrasive and slurry abrasive polishing experiments were conducted under the same fabricating conditions. Finally, the Structural Similarity Index (SSI) was introduced to evaluate the similarity between simulations and experiments for the removal of large aperture mirror, and the best SSI of multi-square-pellet pad is 0. 425 7. The comparison results are acceptable and positive, which shows that the optimized fixed abrasive polishing pad is highly promising for fabrication of large aperture SiC mirrors.关键词
光学加工/碳化硅/非球面反射镜/固着磨料/丸片/填充因子/结构相似度指数Key words
Optical polishing/ SiC/aspherical reflector/ pellet/ fixed abrasive/ filling factor/ structural similarity index分类
机械制造引用本文复制引用
王旭..使用优化的固着磨料磨盘全口径加工碳化硅反射镜[J].光学精密工程,2012,20(10):2123-2131,9.基金项目
国家973重点基础研究发展计划资助项目(No.2011CB01320005) （No.2011CB01320005）
科技部国际合作项目(No.2011DFA50590) （No.2011DFA50590）
